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dual damascene copper interconnect
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dual damascene copper interconnect
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工学
金属互连工艺
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dual damascene copper interconnect
双大马士革铜互连
改进单大马士革工艺,在沉积铜(Cu)之前通过两步刻蚀一次性形成通孔和引线的集成电路制备技术。
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