“dry etching”的概念、定义、翻译、参考文献-科学参考

单词	dry etching
释义	dry etching Encyclopedia 工学干法刻蚀释 dry etching干法刻蚀通过物理和化学方法相结合去除被刻蚀薄膜的技术。工学磁致动器释 dry etching干法刻蚀利用气体或等离子体与材料表面反应形成挥发性物质，或直接轰击材料表面使之被去除的一种可控的工艺过程。 Physics 凝聚态物理学结构 dry etching干刻蚀
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