“doping-based etch-stop technology”的概念、定义、翻译、参考文献-科学参考

单词	doping-based etch-stop technology
释义	doping-based etch-stop technology Encyclopedia 工学［传感器制造］释 doping-based etch-stop technology基于掺杂的自停止技术硅基传感器在腐蚀工艺过程中，当腐蚀液腐蚀到硅中掺杂的其他元素（如硼、磷）、腐蚀到氮化层或氧化层、腐蚀到硅单晶晶向之间的各向异性层时，腐蚀速率出现明显停滞，导致腐蚀自动终止的一种工艺技术。
随便看	Brownian motion Brownian motion process Brownian motion with drift Brownian motor Brownian movement Brownian numbers Brownian oscillator model Brownian particle Brownian path Brownian process Brownian sheet browning browning phenomenon brownish black macula Brownists Brown James Duff brown kiwi brown leaf spot of cassava brown long-eared bat brown-marbled grouper Brown McCoy radical Brown-McCoy radical brownmillerite Brown motion brown paper nautilus

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