“doping-based etch-stop technology”的概念、定义、翻译、参考文献-科学参考

单词	doping-based etch-stop technology
释义	doping-based etch-stop technology Encyclopedia 工学［传感器制造］释 doping-based etch-stop technology基于掺杂的自停止技术硅基传感器在腐蚀工艺过程中，当腐蚀液腐蚀到硅中掺杂的其他元素（如硼、磷）、腐蚀到氮化层或氧化层、腐蚀到硅单晶晶向之间的各向异性层时，腐蚀速率出现明显停滞，导致腐蚀自动终止的一种工艺技术。
随便看	particle shape particle simulation particle size particle size analyzer particle size distribution particle size distribution criterion of clastic rock particle size distribution of atmospheric dust in China particle size distribution of drilling fluid particle size measurements particle size of mineral particle size soft sensor particle size spectrum particle solid-liquid separating equipment particle spectra particle-stabilized emulsion or colloid particle statistics particle swarm algorithm particle swarm optimization particle swarm optimization algorithm particle system particle track particle tracking velocimetry particle track measurement particle velocity particle-vibration coupling model

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