“doping-based etch-stop technology”的概念、定义、翻译、参考文献-科学参考

单词	doping-based etch-stop technology
释义	doping-based etch-stop technology Encyclopedia 工学［传感器制造］释 doping-based etch-stop technology基于掺杂的自停止技术硅基传感器在腐蚀工艺过程中，当腐蚀液腐蚀到硅中掺杂的其他元素（如硼、磷）、腐蚀到氮化层或氧化层、腐蚀到硅单晶晶向之间的各向异性层时，腐蚀速率出现明显停滞，导致腐蚀自动终止的一种工艺技术。
随便看	China Society of Water Economics China Society Press China Sociology in the Contemporary Era China soil management department China Soong Ching Ling Foundation China Southern Airlines Company Limited China Southern Power Grid Co.,Ltd. China-Soviet Exchanged Notes on Resuming Diplomatic Relations China-Soviet rubber cooperation China space activities China Sporting Goods Federation China Sports China Sport Science China Sport Science and Technology China Sport Science Society China Sports Culture Exposition China Sports Daily China Sports Foundation China Sport Show China Sports Lottery China Sports Museum China sports system China Sports Venue Association China's Postgraduate Class for Excellent Youth Peking Opera Performers China's principles of wild animal management

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