“doping-based etch-stop technology”的概念、定义、翻译、参考文献-科学参考

单词	doping-based etch-stop technology
释义	doping-based etch-stop technology Encyclopedia 工学［传感器制造］释 doping-based etch-stop technology基于掺杂的自停止技术硅基传感器在腐蚀工艺过程中，当腐蚀液腐蚀到硅中掺杂的其他元素（如硼、磷）、腐蚀到氮化层或氧化层、腐蚀到硅单晶晶向之间的各向异性层时，腐蚀速率出现明显停滞，导致腐蚀自动终止的一种工艺技术。
随便看	generalized Fokker-Planek equation generalized force generalized Fourier expansion generalized Fourier integral generalized Fourier series generalized Fourier transform generalized Friedman urn model generalized function generalized function algebra generalized function solution generalized function theory generalized fundamental theorem of algebra generalized game Generalized Gamma model generalized geometric programming generalized geometric programming (GGP) generalized gradient generalized gradient approximation generalized-gradient approximation generalized gradient approximation, GGA generalized graph coloring generalized Greenberg conjecture generalized Green formula generalized Green function generalized group

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