“doping-based etch-stop technology”的概念、定义、翻译、参考文献-科学参考

单词	doping-based etch-stop technology
释义	doping-based etch-stop technology Encyclopedia 工学［传感器制造］释 doping-based etch-stop technology基于掺杂的自停止技术硅基传感器在腐蚀工艺过程中，当腐蚀液腐蚀到硅中掺杂的其他元素（如硼、磷）、腐蚀到氮化层或氧化层、腐蚀到硅单晶晶向之间的各向异性层时，腐蚀速率出现明显停滞，导致腐蚀自动终止的一种工艺技术。
随便看	economic territory economic threshold economic transport air velocity economic trial economic types of agriculture region economic types of pastoralism economic ultimate recovery Economic Value Added economic value of water resources economic zone Economic Zone on the west side of the Straits economization economized rational approximation economizer economizer damage economizer hanger tube economy Economy and Society economy circuit Economy, Environment and Equity model economy informatization economy in the revolutionary base areas economy of capitalism in Holland in the 17th century economy of North America in the colonial era economy of traditional Chinese herbal medicines

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