“doping-based etch-stop technology”的概念、定义、翻译、参考文献-科学参考

单词	doping-based etch-stop technology
释义	doping-based etch-stop technology Encyclopedia 工学［传感器制造］释 doping-based etch-stop technology基于掺杂的自停止技术硅基传感器在腐蚀工艺过程中，当腐蚀液腐蚀到硅中掺杂的其他元素（如硼、磷）、腐蚀到氮化层或氧化层、腐蚀到硅单晶晶向之间的各向异性层时，腐蚀速率出现明显停滞，导致腐蚀自动终止的一种工艺技术。
随便看	adiabatic processes of atmosphere adiabatic pulsation adiabatic quantum computation adiabatic rate of air temperature on cropland adiabatic reaction dynamics adiabatic reactor adiabatic shear band adiabatic sound speed adiabatic speed of sound adiabatic structure adiabatic switching adiabatic system adiabatic temperature gradient adiabatic temperature rise adiabatic theorem adiabatic theory adiabatic transition energy adiabatic transport adiabatic wall adiaphanous A Diary for Timothy A Diary in Yizhou A Diary of State-owned Taifuxiang Group A Diary of the Tour to Manjing adiathermal

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