“doping-based etch-stop technology”的概念、定义、翻译、参考文献-科学参考

单词	doping-based etch-stop technology
释义	doping-based etch-stop technology Encyclopedia 工学［传感器制造］释 doping-based etch-stop technology基于掺杂的自停止技术硅基传感器在腐蚀工艺过程中，当腐蚀液腐蚀到硅中掺杂的其他元素（如硼、磷）、腐蚀到氮化层或氧化层、腐蚀到硅单晶晶向之间的各向异性层时，腐蚀速率出现明显停滞，导致腐蚀自动终止的一种工艺技术。
随便看	chain of half-spaces chain of ideals chain of inferences chain of invariant subspaces chain of models chain of paths chain of points chain of production chain of projections chain of QSOs chain of relations chain of responsibility pattern chain of sets chain of subgroups chain of submodules chain of survival chain of syzygies chain of trust chain orientational disorder chain polymerization chain propagation chain propagation reaction chain ratio chain-react chain reaction

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