“doping-based etch-stop technology”的概念、定义、翻译、参考文献-科学参考

单词	doping-based etch-stop technology
释义	doping-based etch-stop technology Encyclopedia 工学［传感器制造］释 doping-based etch-stop technology基于掺杂的自停止技术硅基传感器在腐蚀工艺过程中，当腐蚀液腐蚀到硅中掺杂的其他元素（如硼、磷）、腐蚀到氮化层或氧化层、腐蚀到硅单晶晶向之间的各向异性层时，腐蚀速率出现明显停滞，导致腐蚀自动终止的一种工艺技术。
随便看	moduli space of algebraic surfaces moduli space of Hodge structure moduli space of Riemann surface moduli space stack moduli theory moduli tower moduli transformation group moduli variety modulo index modulo multiplication group modulo n modulo order modulo ρ-homology group modulus modulus function modulus number modulus of a complex number modulus of a congruence modulus of a domain modulus of a family of curves modulus of a family of surfaces modulus of a group modulus of a hypocycloid modulus of an alternion modulus of an annular domain

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