“doping-based etch-stop technology”的概念、定义、翻译、参考文献-科学参考

单词	doping-based etch-stop technology
释义	doping-based etch-stop technology Encyclopedia 工学［传感器制造］释 doping-based etch-stop technology基于掺杂的自停止技术硅基传感器在腐蚀工艺过程中，当腐蚀液腐蚀到硅中掺杂的其他元素（如硼、磷）、腐蚀到氮化层或氧化层、腐蚀到硅单晶晶向之间的各向异性层时，腐蚀速率出现明显停滞，导致腐蚀自动终止的一种工艺技术。
随便看	shallow fertilization shallow-focus earthquake shallow foundation shallow geothermal energy shallow geothermal energy survey shallow geothermal heat exchanger shallow impurity shallow lake shallow lake subfacie shallow land burial shallow lens shallow level shallow level impurities shallow level impurity shallow level semiconductor shallow liquid culture shallow marine facies shallow marine sediment geochemical survey shallow parsing shallow reading shallow refraction seismometer shallow-sea fishery environment shallow seismic method shallow seismic profile technology shallow seismic prospecting

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