“doping-based etch-stop technology”的概念、定义、翻译、参考文献-科学参考

单词	doping-based etch-stop technology
释义	doping-based etch-stop technology Encyclopedia 工学［传感器制造］释 doping-based etch-stop technology基于掺杂的自停止技术硅基传感器在腐蚀工艺过程中，当腐蚀液腐蚀到硅中掺杂的其他元素（如硼、磷）、腐蚀到氮化层或氧化层、腐蚀到硅单晶晶向之间的各向异性层时，腐蚀速率出现明显停滞，导致腐蚀自动终止的一种工艺技术。
随便看	lightening protection system of wind turbine system light environment light environment in other road sections light environment of livestock light environment of museum building light environment regulation light equation light equipment lighter Lighterage operation on water lightest supersymmetric particle light extinction method light extraction efficiency light falling net fishing machinery light falling net fishing vessel light field Light field display light filter light [fission] fragment light fission fragment light flash method light-flavoured herbs light flint light float light flux

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