“doping-based etch-stop technology”的概念、定义、翻译、参考文献-科学参考

单词	doping-based etch-stop technology
释义	doping-based etch-stop technology Encyclopedia 工学［传感器制造］释 doping-based etch-stop technology基于掺杂的自停止技术硅基传感器在腐蚀工艺过程中，当腐蚀液腐蚀到硅中掺杂的其他元素（如硼、磷）、腐蚀到氮化层或氧化层、腐蚀到硅单晶晶向之间的各向异性层时，腐蚀速率出现明显停滞，导致腐蚀自动终止的一种工艺技术。
随便看	numerical instability numerical integration numerical integration in FEM numerical interpolation numerical invariant numerical linear algebra numerically controlled electrochemical contour evolution machining numerically controlled machine tool numerically effective divisor numerically effective divisor; nef divisor numerically equal numerically equivalence numerically equivalent numerically equivalent cycles numerical manifold method numerical mathematics numerical mesh generation numerical method Numerical Method for orbital evolution numerical method for precise ephemeris numerical method of celestial mechanics numerical method of groundwater numerical minimization numerical model numerical modeling

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