“doping-based etch-stop technology”的概念、定义、翻译、参考文献-科学参考

单词	doping-based etch-stop technology
释义	doping-based etch-stop technology Encyclopedia 工学［传感器制造］释 doping-based etch-stop technology基于掺杂的自停止技术硅基传感器在腐蚀工艺过程中，当腐蚀液腐蚀到硅中掺杂的其他元素（如硼、磷）、腐蚀到氮化层或氧化层、腐蚀到硅单晶晶向之间的各向异性层时，腐蚀速率出现明显停滞，导致腐蚀自动终止的一种工艺技术。
随便看	magnetic index magnetic induced polarization effect magnetic induction magnetic induction hyperthermia magnetic induction imaging magnetic induction line magnetic induction thermotherapy magnetic information material magnetic instability magnetic instruments magnetic insulator magnetic intensity magnetic interaction magnetic interference magnetic inversion line magnetic island [magnetic] isoclinic line magnetic isoclinic line [magnetic] isoclinic line, isocline magnetic isoclinic line, isocline magnetic isotope effect magnetic knot magnetic lattice magnetic layer magneticlcellsorting

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